Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition

Journal of Applied Physics

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Bibliographic Details
Main Authors:	Ren, Z.M., Lu, Y.F., Ni, H.Q., Liew, T.Y.F., Cheong, B.A., Chow, S.K., Ng, M.L., Wang, J.P.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62727
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-62727
record_format	dspace
spelling	sg-nus-scholar.10635-627272016-11-30T07:08:04Z Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition Ren, Z.M. Lu, Y.F. Ni, H.Q. Liew, T.Y.F. Cheong, B.A. Chow, S.K. Ng, M.L. Wang, J.P. ELECTRICAL ENGINEERING Journal of Applied Physics 88 12 7346-7350 JAPIA 2014-06-17T06:54:12Z 2014-06-17T06:54:12Z 2000-12-15 Article Ren, Z.M.,Lu, Y.F.,Ni, H.Q.,Liew, T.Y.F.,Cheong, B.A.,Chow, S.K.,Ng, M.L.,Wang, J.P. (2000-12-15). Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition. Journal of Applied Physics 88 (12) : 7346-7350. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/62727 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Journal of Applied Physics
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Ren, Z.M. Lu, Y.F. Ni, H.Q. Liew, T.Y.F. Cheong, B.A. Chow, S.K. Ng, M.L. Wang, J.P.
format	Article
author	Ren, Z.M. Lu, Y.F. Ni, H.Q. Liew, T.Y.F. Cheong, B.A. Chow, S.K. Ng, M.L. Wang, J.P.
spellingShingle	Ren, Z.M. Lu, Y.F. Ni, H.Q. Liew, T.Y.F. Cheong, B.A. Chow, S.K. Ng, M.L. Wang, J.P. Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition
author_sort	Ren, Z.M.
title	Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition
title_short	Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition
title_full	Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition
title_fullStr	Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition
title_full_unstemmed	Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition
title_sort	room temperature synthesis of c-ain thin films by nitrogen-ion-assisted pulsed laser deposition
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62727
_version_	1681085828589158400

Room temperature synthesis of c-AIN thin films by nitrogen-ion-assisted pulsed laser deposition

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