Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope

10.1109/16.223700

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Bibliographic Details
Main Authors: Chan, Daniel S.H., Pey, Kin Leong, Phang, Jacob C.H.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/62752
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Institution: National University of Singapore