Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope

10.1109/16.223700

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Main Authors:	Chan, Daniel S.H., Pey, Kin Leong, Phang, Jacob C.H.
Other Authors:	INSTITUTE OF MICROELECTRONICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62752
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-627522024-11-13T12:54:00Z Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope Chan, Daniel S.H. Pey, Kin Leong Phang, Jacob C.H. INSTITUTE OF MICROELECTRONICS ELECTRICAL ENGINEERING 10.1109/16.223700 IEEE Transactions on Electron Devices 40 8 1417-1425 IETDA 2014-06-17T06:54:28Z 2014-06-17T06:54:28Z 1993-08 Article Chan, Daniel S.H., Pey, Kin Leong, Phang, Jacob C.H. (1993-08). Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope. IEEE Transactions on Electron Devices 40 (8) : 1417-1425. ScholarBank@NUS Repository. https://doi.org/10.1109/16.223700 00189383 http://scholarbank.nus.edu.sg/handle/10635/62752 A1993LN72600009 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1109/16.223700
author2	INSTITUTE OF MICROELECTRONICS
author_facet	INSTITUTE OF MICROELECTRONICS Chan, Daniel S.H. Pey, Kin Leong Phang, Jacob C.H.
format	Article
author	Chan, Daniel S.H. Pey, Kin Leong Phang, Jacob C.H.
spellingShingle	Chan, Daniel S.H. Pey, Kin Leong Phang, Jacob C.H. Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope
author_sort	Chan, Daniel S.H.
title	Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope
title_short	Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope
title_full	Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope
title_fullStr	Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope
title_full_unstemmed	Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope
title_sort	semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62752
_version_	1821206477615923200

Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope

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