Evaluation of electrical stress effects on SiO2-Si structures using scanning electron microscope cathodoluminescence

Evaluation of electrical stress effects on SiO2-Si structures using scanning electron microscope cathodoluminescence

10.1063/1.122803

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Bibliographic Details
Main Authors: Liu, X., Chan, D.S.H., Chim, W.K., Phang, J.C.H.
Other Authors: ELECTRICAL ENGINEERING
Format: Review
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81818
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/81818

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