Evaluation of electrical stress effects on SiO2-Si structures using scanning electron microscope cathodoluminescence

10.1063/1.122803

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Bibliographic Details
Main Authors:	Liu, X., Chan, D.S.H., Chim, W.K., Phang, J.C.H.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Review
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81818
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81818
record_format	dspace
spelling	sg-nus-scholar.10635-818182023-10-29T23:34:37Z Evaluation of electrical stress effects on SiO2-Si structures using scanning electron microscope cathodoluminescence Liu, X. Chan, D.S.H. Chim, W.K. Phang, J.C.H. ELECTRICAL ENGINEERING 10.1063/1.122803 Applied Physics Letters 73 24 3548-3549 APPLA 2014-10-07T03:12:22Z 2014-10-07T03:12:22Z 1998 Review Liu, X., Chan, D.S.H., Chim, W.K., Phang, J.C.H. (1998). Evaluation of electrical stress effects on SiO2-Si structures using scanning electron microscope cathodoluminescence. Applied Physics Letters 73 (24) : 3548-3549. ScholarBank@NUS Repository. https://doi.org/10.1063/1.122803 00036951 http://scholarbank.nus.edu.sg/handle/10635/81818 000077402800023 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.122803
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Liu, X. Chan, D.S.H. Chim, W.K. Phang, J.C.H.
format	Review
author	Liu, X. Chan, D.S.H. Chim, W.K. Phang, J.C.H.
spellingShingle	Liu, X. Chan, D.S.H. Chim, W.K. Phang, J.C.H. Evaluation of electrical stress effects on SiO2-Si structures using scanning electron microscope cathodoluminescence
author_sort	Liu, X.
title	Evaluation of electrical stress effects on SiO2-Si structures using scanning electron microscope cathodoluminescence
title_short	Evaluation of electrical stress effects on SiO2-Si structures using scanning electron microscope cathodoluminescence
title_full	Evaluation of electrical stress effects on SiO2-Si structures using scanning electron microscope cathodoluminescence
title_fullStr	Evaluation of electrical stress effects on SiO2-Si structures using scanning electron microscope cathodoluminescence
title_full_unstemmed	Evaluation of electrical stress effects on SiO2-Si structures using scanning electron microscope cathodoluminescence
title_sort	evaluation of electrical stress effects on sio2-si structures using scanning electron microscope cathodoluminescence
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81818
_version_	1781783990917660672

Evaluation of electrical stress effects on SiO2-Si structures using scanning electron microscope cathodoluminescence

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