The rapid secondary electron imaging system of the proton beam writer at CIBA
10.1016/j.nimb.2007.02.112
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2014
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sg-nus-scholar.10635-650422023-10-25T07:03:39Z The rapid secondary electron imaging system of the proton beam writer at CIBA Udalagama, C.N.B. Bettiol, A.A. van Kan, J.A. Teo, E.J. Watt, F. PHYSICS MATERIALS SCIENCE AND ENGINEERING Data acquisition p-Beam writing Rapid imaging Secondary electrons 10.1016/j.nimb.2007.02.112 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 1 390-395 NIMBE 2014-06-17T08:00:28Z 2014-06-17T08:00:28Z 2007-07 Article Udalagama, C.N.B., Bettiol, A.A., van Kan, J.A., Teo, E.J., Watt, F. (2007-07). The rapid secondary electron imaging system of the proton beam writer at CIBA. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 (1) : 390-395. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.02.112 0168583X http://scholarbank.nus.edu.sg/handle/10635/65042 000248264900075 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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Data acquisition p-Beam writing Rapid imaging Secondary electrons |
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Data acquisition p-Beam writing Rapid imaging Secondary electrons Udalagama, C.N.B. Bettiol, A.A. van Kan, J.A. Teo, E.J. Watt, F. The rapid secondary electron imaging system of the proton beam writer at CIBA |
| description |
10.1016/j.nimb.2007.02.112 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Udalagama, C.N.B. Bettiol, A.A. van Kan, J.A. Teo, E.J. Watt, F. |
| format |
Article |
| author |
Udalagama, C.N.B. Bettiol, A.A. van Kan, J.A. Teo, E.J. Watt, F. |
| author_sort |
Udalagama, C.N.B. |
| title |
The rapid secondary electron imaging system of the proton beam writer at CIBA |
| title_short |
The rapid secondary electron imaging system of the proton beam writer at CIBA |
| title_full |
The rapid secondary electron imaging system of the proton beam writer at CIBA |
| title_fullStr |
The rapid secondary electron imaging system of the proton beam writer at CIBA |
| title_full_unstemmed |
The rapid secondary electron imaging system of the proton beam writer at CIBA |
| title_sort |
rapid secondary electron imaging system of the proton beam writer at ciba |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/65042 |
| _version_ |
1781782551781703680 |