The rapid secondary electron imaging system of the proton beam writer at CIBA

• Main Authors: Udalagama, C.N.B., Bettiol, A.A., van Kan, J.A., Teo, E.J., Watt, F.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Subjects: Data acquisition; p-Beam writing; Rapid imaging; Secondary electrons
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/65042
• Institution: National University of Singapore

10.1016/j.nimb.2007.02.112