Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30 nm dimensions

• Main Authors: Van Kan, J.A., Shao, P.G., Molter, P., Saumer, M., Bettiol, A.A., Osipowicz, T., Watt, F.
• Other Authors: PHYSICS
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Direct write; Nuclear microscopy; Proton beam writing; Resolution standard
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98703
• Institution: National University of Singapore

10.1016/j.nimb.2005.01.052