Three-dimensional control of optical waveguide fabrication in silicon

10.1364/OE.16.000573

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Bibliographic Details
Main Authors:	Teo, E.J., Bettiol, A.A., Breese, M.B.H., Yang, P., Mashanovich, G.Z., Headley, W.R., Reed, G.T., Blackwood, D.J.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/65049
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-65049
record_format	dspace
spelling	sg-nus-scholar.10635-650492023-10-30T20:58:04Z Three-dimensional control of optical waveguide fabrication in silicon Teo, E.J. Bettiol, A.A. Breese, M.B.H. Yang, P. Mashanovich, G.Z. Headley, W.R. Reed, G.T. Blackwood, D.J. PHYSICS MATERIALS SCIENCE AND ENGINEERING 10.1364/OE.16.000573 Optics Express 16 2 573-578 2014-06-17T08:00:33Z 2014-06-17T08:00:33Z 2008-01-21 Article Teo, E.J., Bettiol, A.A., Breese, M.B.H., Yang, P., Mashanovich, G.Z., Headley, W.R., Reed, G.T., Blackwood, D.J. (2008-01-21). Three-dimensional control of optical waveguide fabrication in silicon. Optics Express 16 (2) : 573-578. ScholarBank@NUS Repository. https://doi.org/10.1364/OE.16.000573 10944087 http://scholarbank.nus.edu.sg/handle/10635/65049 000252479700009 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1364/OE.16.000573
author2	PHYSICS
author_facet	PHYSICS Teo, E.J. Bettiol, A.A. Breese, M.B.H. Yang, P. Mashanovich, G.Z. Headley, W.R. Reed, G.T. Blackwood, D.J.
format	Article
author	Teo, E.J. Bettiol, A.A. Breese, M.B.H. Yang, P. Mashanovich, G.Z. Headley, W.R. Reed, G.T. Blackwood, D.J.
spellingShingle	Teo, E.J. Bettiol, A.A. Breese, M.B.H. Yang, P. Mashanovich, G.Z. Headley, W.R. Reed, G.T. Blackwood, D.J. Three-dimensional control of optical waveguide fabrication in silicon
author_sort	Teo, E.J.
title	Three-dimensional control of optical waveguide fabrication in silicon
title_short	Three-dimensional control of optical waveguide fabrication in silicon
title_full	Three-dimensional control of optical waveguide fabrication in silicon
title_fullStr	Three-dimensional control of optical waveguide fabrication in silicon
title_full_unstemmed	Three-dimensional control of optical waveguide fabrication in silicon
title_sort	three-dimensional control of optical waveguide fabrication in silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/65049
_version_	1781782552531435520

Three-dimensional control of optical waveguide fabrication in silicon

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