Three-dimensional control of optical waveguide fabrication in silicon

Three-dimensional control of optical waveguide fabrication in silicon

10.1364/OE.16.000573

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Bibliographic Details
Main Authors:	Teo, E.J., Bettiol, A.A., Breese, M.B.H., Yang, P., Mashanovich, G.Z., Headley, W.R., Reed, G.T., Blackwood, D.J.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/65049
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Institution:	National University of Singapore

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