Fabrication of three-dimensional hemispherical structures using photolithography
10.1007/s10404-009-0436-3
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2014
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sg-nus-scholar.10635-670522023-10-29T22:47:16Z Fabrication of three-dimensional hemispherical structures using photolithography Lim, C.T. Low, H.Y. Ng, J.K.K. Liu, W.-T. Zhang, Y. DIVISION OF ENVIRONMENTAL SCIENCE & ENGG BIOENGINEERING 3D structures Microfluidics Photolithography Soft lithography SU-8 10.1007/s10404-009-0436-3 Microfluidics and Nanofluidics 7 5 721-726 2014-06-17T09:43:51Z 2014-06-17T09:43:51Z 2009-11 Article Lim, C.T., Low, H.Y., Ng, J.K.K., Liu, W.-T., Zhang, Y. (2009-11). Fabrication of three-dimensional hemispherical structures using photolithography. Microfluidics and Nanofluidics 7 (5) : 721-726. ScholarBank@NUS Repository. https://doi.org/10.1007/s10404-009-0436-3 16134982 http://scholarbank.nus.edu.sg/handle/10635/67052 000271418500010 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
3D structures Microfluidics Photolithography Soft lithography SU-8 |
| spellingShingle |
3D structures Microfluidics Photolithography Soft lithography SU-8 Lim, C.T. Low, H.Y. Ng, J.K.K. Liu, W.-T. Zhang, Y. Fabrication of three-dimensional hemispherical structures using photolithography |
| description |
10.1007/s10404-009-0436-3 |
| author2 |
DIVISION OF ENVIRONMENTAL SCIENCE & ENGG |
| author_facet |
DIVISION OF ENVIRONMENTAL SCIENCE & ENGG Lim, C.T. Low, H.Y. Ng, J.K.K. Liu, W.-T. Zhang, Y. |
| format |
Article |
| author |
Lim, C.T. Low, H.Y. Ng, J.K.K. Liu, W.-T. Zhang, Y. |
| author_sort |
Lim, C.T. |
| title |
Fabrication of three-dimensional hemispherical structures using photolithography |
| title_short |
Fabrication of three-dimensional hemispherical structures using photolithography |
| title_full |
Fabrication of three-dimensional hemispherical structures using photolithography |
| title_fullStr |
Fabrication of three-dimensional hemispherical structures using photolithography |
| title_full_unstemmed |
Fabrication of three-dimensional hemispherical structures using photolithography |
| title_sort |
fabrication of three-dimensional hemispherical structures using photolithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/67052 |
| _version_ |
1781782797905559552 |