Three-dimensional microfabrication by photolithography and electroforming

Three-dimensional microfabrication by photolithography and electroforming

ICMA 2004 - Proceedings of the International Conference on Manufacturing Automation: Advanced Design and Manufacturing in Global Competition

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Bibliographic Details
Main Authors: Thian, S.C.H., Tang, L.X., Fuh, J.Y.H., Wong, Y.S., Lu, L., Loh, H.T.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Electroforming
Microfabrication
Photolithography
Photomask
Photopolymer
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73961
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/73961

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