Micro-rapid-prototyping via multi-layered photo-lithography

Micro-rapid-prototyping via multi-layered photo-lithography

10.1007/s00170-005-2620-2

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Bibliographic Details
Main Authors: Thian, S.C.H., Tang, Y., Fuh, J.Y.H., Wong, Y.S., Lu, L., Loh, H.T.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Micro-fabrication
Photolithography
Photomask
Photopolymer
Rapid prototyping
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60752
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/60752

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