Micro-rapid-prototyping via multi-layered photo-lithography

10.1007/s00170-005-2620-2

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Bibliographic Details
Main Authors:	Thian, S.C.H., Tang, Y., Fuh, J.Y.H., Wong, Y.S., Lu, L., Loh, H.T.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Micro-fabrication Photolithography Photomask Photopolymer Rapid prototyping
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60752
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-60752
record_format	dspace
spelling	sg-nus-scholar.10635-607522023-10-30T09:38:17Z Micro-rapid-prototyping via multi-layered photo-lithography Thian, S.C.H. Tang, Y. Fuh, J.Y.H. Wong, Y.S. Lu, L. Loh, H.T. MECHANICAL ENGINEERING Micro-fabrication Photolithography Photomask Photopolymer Rapid prototyping 10.1007/s00170-005-2620-2 International Journal of Advanced Manufacturing Technology 29 9-10 1026-1032 IJATE 2014-06-17T06:26:55Z 2014-06-17T06:26:55Z 2006-07 Article Thian, S.C.H., Tang, Y., Fuh, J.Y.H., Wong, Y.S., Lu, L., Loh, H.T. (2006-07). Micro-rapid-prototyping via multi-layered photo-lithography. International Journal of Advanced Manufacturing Technology 29 (9-10) : 1026-1032. ScholarBank@NUS Repository. https://doi.org/10.1007/s00170-005-2620-2 02683768 http://scholarbank.nus.edu.sg/handle/10635/60752 000239560100022 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Micro-fabrication Photolithography Photomask Photopolymer Rapid prototyping
spellingShingle	Micro-fabrication Photolithography Photomask Photopolymer Rapid prototyping Thian, S.C.H. Tang, Y. Fuh, J.Y.H. Wong, Y.S. Lu, L. Loh, H.T. Micro-rapid-prototyping via multi-layered photo-lithography
description	10.1007/s00170-005-2620-2
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Thian, S.C.H. Tang, Y. Fuh, J.Y.H. Wong, Y.S. Lu, L. Loh, H.T.
format	Article
author	Thian, S.C.H. Tang, Y. Fuh, J.Y.H. Wong, Y.S. Lu, L. Loh, H.T.
author_sort	Thian, S.C.H.
title	Micro-rapid-prototyping via multi-layered photo-lithography
title_short	Micro-rapid-prototyping via multi-layered photo-lithography
title_full	Micro-rapid-prototyping via multi-layered photo-lithography
title_fullStr	Micro-rapid-prototyping via multi-layered photo-lithography
title_full_unstemmed	Micro-rapid-prototyping via multi-layered photo-lithography
title_sort	micro-rapid-prototyping via multi-layered photo-lithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/60752
_version_	1781781908095500288

Micro-rapid-prototyping via multi-layered photo-lithography

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