Micro-rapid-prototyping via multi-layered photo-lithography
10.1007/s00170-005-2620-2
محفوظ في:
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| مؤلفون آخرون: | |
| التنسيق: | مقال |
| منشور في: |
2014
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| الوصول للمادة أونلاين: | http://scholarbank.nus.edu.sg/handle/10635/60752 |
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| المؤسسة: | National University of Singapore |
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sg-nus-scholar.10635-607522024-11-12T18:37:32Z Micro-rapid-prototyping via multi-layered photo-lithography Thian, S.C.H. Tang, Y. Fuh, J.Y.H. Wong, Y.S. Lu, L. Loh, H.T. MECHANICAL ENGINEERING Micro-fabrication Photolithography Photomask Photopolymer Rapid prototyping 10.1007/s00170-005-2620-2 International Journal of Advanced Manufacturing Technology 29 9-10 1026-1032 IJATE 2014-06-17T06:26:55Z 2014-06-17T06:26:55Z 2006-07 Article Thian, S.C.H., Tang, Y., Fuh, J.Y.H., Wong, Y.S., Lu, L., Loh, H.T. (2006-07). Micro-rapid-prototyping via multi-layered photo-lithography. International Journal of Advanced Manufacturing Technology 29 (9-10) : 1026-1032. ScholarBank@NUS Repository. https://doi.org/10.1007/s00170-005-2620-2 02683768 http://scholarbank.nus.edu.sg/handle/10635/60752 000239560100022 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Micro-fabrication Photolithography Photomask Photopolymer Rapid prototyping |
| spellingShingle |
Micro-fabrication Photolithography Photomask Photopolymer Rapid prototyping Thian, S.C.H. Tang, Y. Fuh, J.Y.H. Wong, Y.S. Lu, L. Loh, H.T. Micro-rapid-prototyping via multi-layered photo-lithography |
| description |
10.1007/s00170-005-2620-2 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Thian, S.C.H. Tang, Y. Fuh, J.Y.H. Wong, Y.S. Lu, L. Loh, H.T. |
| format |
Article |
| author |
Thian, S.C.H. Tang, Y. Fuh, J.Y.H. Wong, Y.S. Lu, L. Loh, H.T. |
| author_sort |
Thian, S.C.H. |
| title |
Micro-rapid-prototyping via multi-layered photo-lithography |
| title_short |
Micro-rapid-prototyping via multi-layered photo-lithography |
| title_full |
Micro-rapid-prototyping via multi-layered photo-lithography |
| title_fullStr |
Micro-rapid-prototyping via multi-layered photo-lithography |
| title_full_unstemmed |
Micro-rapid-prototyping via multi-layered photo-lithography |
| title_sort |
micro-rapid-prototyping via multi-layered photo-lithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/60752 |
| _version_ |
1821219521004830720 |