Three-dimensional microfabrication by photolithography and electroforming

• Main Authors: Thian, S.C.H., Tang, L.X., Fuh, J.Y.H., Wong, Y.S., Lu, L., Loh, H.T.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Electroforming; Microfabrication; Photolithography; Photomask; Photopolymer
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/73961
• Institution: National University of Singapore

ICMA 2004 - Proceedings of the International Conference on Manufacturing Automation: Advanced Design and Manufacturing in Global Competition