Three-dimensional microfabrication by photolithography and electroforming

Three-dimensional microfabrication by photolithography and electroforming

ICMA 2004 - Proceedings of the International Conference on Manufacturing Automation: Advanced Design and Manufacturing in Global Competition

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Bibliographic Details
Main Authors: Thian, S.C.H., Tang, L.X., Fuh, J.Y.H., Wong, Y.S., Lu, L., Loh, H.T.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Electroforming
Microfabrication
Photolithography
Photomask
Photopolymer
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73961
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Institution: National University of Singapore
id sg-nus-scholar.10635-73961
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spelling sg-nus-scholar.10635-739612015-01-31T11:57:26Z Three-dimensional microfabrication by photolithography and electroforming Thian, S.C.H. Tang, L.X. Fuh, J.Y.H. Wong, Y.S. Lu, L. Loh, H.T. MECHANICAL ENGINEERING Electroforming Microfabrication Photolithography Photomask Photopolymer ICMA 2004 - Proceedings of the International Conference on Manufacturing Automation: Advanced Design and Manufacturing in Global Competition 795-802 2014-06-19T05:41:26Z 2014-06-19T05:41:26Z 2004 Conference Paper Thian, S.C.H.,Tang, L.X.,Fuh, J.Y.H.,Wong, Y.S.,Lu, L.,Loh, H.T. (2004). Three-dimensional microfabrication by photolithography and electroforming. ICMA 2004 - Proceedings of the International Conference on Manufacturing Automation: Advanced Design and Manufacturing in Global Competition : 795-802. ScholarBank@NUS Repository. 1860584683 http://scholarbank.nus.edu.sg/handle/10635/73961 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Electroforming
Microfabrication
Photolithography
Photomask
Photopolymer
spellingShingle Electroforming
Microfabrication
Photolithography
Photomask
Photopolymer
Thian, S.C.H.
Tang, L.X.
Fuh, J.Y.H.
Wong, Y.S.
Lu, L.
Loh, H.T.
Three-dimensional microfabrication by photolithography and electroforming
description ICMA 2004 - Proceedings of the International Conference on Manufacturing Automation: Advanced Design and Manufacturing in Global Competition
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Thian, S.C.H.
Tang, L.X.
Fuh, J.Y.H.
Wong, Y.S.
Lu, L.
Loh, H.T.
format Conference or Workshop Item
author Thian, S.C.H.
Tang, L.X.
Fuh, J.Y.H.
Wong, Y.S.
Lu, L.
Loh, H.T.
author_sort Thian, S.C.H.
title Three-dimensional microfabrication by photolithography and electroforming
title_short Three-dimensional microfabrication by photolithography and electroforming
title_full Three-dimensional microfabrication by photolithography and electroforming
title_fullStr Three-dimensional microfabrication by photolithography and electroforming
title_full_unstemmed Three-dimensional microfabrication by photolithography and electroforming
title_sort three-dimensional microfabrication by photolithography and electroforming
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/73961
_version_ 1681087842978103296

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