Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis

Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis

10.1023/A:1022914020076

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Bibliographic Details
Main Authors: Xie, W.C., Lee, H.P., Lim, S.P.
Other Authors: MECHANICAL ENGINEERING
Format: Review
Published: 2014
Subjects:
Clamped-clamped micro beams
Micro switch
Nonlinear modal analysis
Online Access:http://scholarbank.nus.edu.sg/handle/10635/68353
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/68353

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