A novel micromechanical resonator using two-dimensional phononic crystal slab

10.4028/www.scientific.net/AMR.254.195

Saved in:

Bibliographic Details
Main Authors:	Wang, N., Hsiao, F.-L., Palaniapan, M., Tsai, J.M., Soon, B.W., Kwong, D.-L., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Cavity-mode CMOS compatible Phononic crystal Resonator
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/68977
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

Be the first to leave a comment!

Similar Items