A spectroscopic SEM: First results
10.1109/IPFA.2006.250996
Saved in:
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Conference or Workshop Item |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/69084 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
id |
sg-nus-scholar.10635-69084 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-690842015-01-07T05:40:01Z A spectroscopic SEM: First results Osterberg, M. Khursheed, A. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IPFA.2006.250996 Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 54-57 2014-06-19T02:56:39Z 2014-06-19T02:56:39Z 2006 Conference Paper Osterberg, M.,Khursheed, A. (2006). A spectroscopic SEM: First results. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 54-57. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IPFA.2006.250996" target="_blank">https://doi.org/10.1109/IPFA.2006.250996</a> 1424402069 http://scholarbank.nus.edu.sg/handle/10635/69084 NOT_IN_WOS Scopus |
institution |
National University of Singapore |
building |
NUS Library |
country |
Singapore |
collection |
ScholarBank@NUS |
description |
10.1109/IPFA.2006.250996 |
author2 |
ELECTRICAL & COMPUTER ENGINEERING |
author_facet |
ELECTRICAL & COMPUTER ENGINEERING Osterberg, M. Khursheed, A. |
format |
Conference or Workshop Item |
author |
Osterberg, M. Khursheed, A. |
spellingShingle |
Osterberg, M. Khursheed, A. A spectroscopic SEM: First results |
author_sort |
Osterberg, M. |
title |
A spectroscopic SEM: First results |
title_short |
A spectroscopic SEM: First results |
title_full |
A spectroscopic SEM: First results |
title_fullStr |
A spectroscopic SEM: First results |
title_full_unstemmed |
A spectroscopic SEM: First results |
title_sort |
spectroscopic sem: first results |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/69084 |
_version_ |
1681086948937039872 |