A spectroscopic SEM: First results

10.1109/IPFA.2006.250996

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Main Authors: Osterberg, M., Khursheed, A.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69084
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-690842015-01-07T05:40:01Z A spectroscopic SEM: First results Osterberg, M. Khursheed, A. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IPFA.2006.250996 Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 54-57 2014-06-19T02:56:39Z 2014-06-19T02:56:39Z 2006 Conference Paper Osterberg, M.,Khursheed, A. (2006). A spectroscopic SEM: First results. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 54-57. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IPFA.2006.250996" target="_blank">https://doi.org/10.1109/IPFA.2006.250996</a> 1424402069 http://scholarbank.nus.edu.sg/handle/10635/69084 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description 10.1109/IPFA.2006.250996
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Osterberg, M.
Khursheed, A.
format Conference or Workshop Item
author Osterberg, M.
Khursheed, A.
spellingShingle Osterberg, M.
Khursheed, A.
A spectroscopic SEM: First results
author_sort Osterberg, M.
title A spectroscopic SEM: First results
title_short A spectroscopic SEM: First results
title_full A spectroscopic SEM: First results
title_fullStr A spectroscopic SEM: First results
title_full_unstemmed A spectroscopic SEM: First results
title_sort spectroscopic sem: first results
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/69084
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