An in-situ temperature measurement system for DUV lithography
Conference Record - IEEE Instrumentation and Measurement Technology Conference
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2014
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sg-nus-scholar.10635-693302024-11-08T19:28:01Z An in-situ temperature measurement system for DUV lithography Tan, W.W. Zhang, J. ELECTRICAL & COMPUTER ENGINEERING In-situ temperature measurement Measurement accuracy Out-of-contact fault Post-exposure bake Conference Record - IEEE Instrumentation and Measurement Technology Conference 1 843-848 CRIIE 2014-06-19T02:59:27Z 2014-06-19T02:59:27Z 2002 Conference Paper Tan, W.W.,Zhang, J. (2002). An in-situ temperature measurement system for DUV lithography. Conference Record - IEEE Instrumentation and Measurement Technology Conference 1 : 843-848. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/69330 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
In-situ temperature measurement Measurement accuracy Out-of-contact fault Post-exposure bake |
| spellingShingle |
In-situ temperature measurement Measurement accuracy Out-of-contact fault Post-exposure bake Tan, W.W. Zhang, J. An in-situ temperature measurement system for DUV lithography |
| description |
Conference Record - IEEE Instrumentation and Measurement Technology Conference |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tan, W.W. Zhang, J. |
| format |
Conference or Workshop Item |
| author |
Tan, W.W. Zhang, J. |
| author_sort |
Tan, W.W. |
| title |
An in-situ temperature measurement system for DUV lithography |
| title_short |
An in-situ temperature measurement system for DUV lithography |
| title_full |
An in-situ temperature measurement system for DUV lithography |
| title_fullStr |
An in-situ temperature measurement system for DUV lithography |
| title_full_unstemmed |
An in-situ temperature measurement system for DUV lithography |
| title_sort |
in-situ temperature measurement system for duv lithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/69330 |
| _version_ |
1821230560992821248 |