Coupling of resonant modes in micromechanical vibratory rate gyroscopes

Coupling of resonant modes in micromechanical vibratory rate gyroscopes

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

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Bibliographic Details
Main Authors: Phani, A.S., Seshia, A.A., Palaniapan, M., Howe, R.T., Yasaitis, J.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Micromechanical gyroscope
Resonant coupling
Surface micromachining
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69758
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Institution: National University of Singapore
Description
Summary:2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

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