Coupling of resonant modes in micromechanical vibratory rate gyroscopes

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

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Bibliographic Details
Main Authors:	Phani, A.S., Seshia, A.A., Palaniapan, M., Howe, R.T., Yasaitis, J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Micromechanical gyroscope Resonant coupling Surface micromachining
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/69758
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-69758
record_format	dspace
spelling	sg-nus-scholar.10635-697582015-02-23T14:10:48Z Coupling of resonant modes in micromechanical vibratory rate gyroscopes Phani, A.S. Seshia, A.A. Palaniapan, M. Howe, R.T. Yasaitis, J. ELECTRICAL & COMPUTER ENGINEERING Micromechanical gyroscope Resonant coupling Surface micromachining 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 2 335-338 2014-06-19T03:04:20Z 2014-06-19T03:04:20Z 2004 Conference Paper Phani, A.S.,Seshia, A.A.,Palaniapan, M.,Howe, R.T.,Yasaitis, J. (2004). Coupling of resonant modes in micromechanical vibratory rate gyroscopes. 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 2 : 335-338. ScholarBank@NUS Repository. 0972842276 http://scholarbank.nus.edu.sg/handle/10635/69758 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Micromechanical gyroscope Resonant coupling Surface micromachining
spellingShingle	Micromechanical gyroscope Resonant coupling Surface micromachining Phani, A.S. Seshia, A.A. Palaniapan, M. Howe, R.T. Yasaitis, J. Coupling of resonant modes in micromechanical vibratory rate gyroscopes
description	2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Phani, A.S. Seshia, A.A. Palaniapan, M. Howe, R.T. Yasaitis, J.
format	Conference or Workshop Item
author	Phani, A.S. Seshia, A.A. Palaniapan, M. Howe, R.T. Yasaitis, J.
author_sort	Phani, A.S.
title	Coupling of resonant modes in micromechanical vibratory rate gyroscopes
title_short	Coupling of resonant modes in micromechanical vibratory rate gyroscopes
title_full	Coupling of resonant modes in micromechanical vibratory rate gyroscopes
title_fullStr	Coupling of resonant modes in micromechanical vibratory rate gyroscopes
title_full_unstemmed	Coupling of resonant modes in micromechanical vibratory rate gyroscopes
title_sort	coupling of resonant modes in micromechanical vibratory rate gyroscopes
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/69758
_version_	1681087072331366400

Coupling of resonant modes in micromechanical vibratory rate gyroscopes

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