Demonstration of secondary electron detection using monolithic multi-channel electron detector

10.1109/IMNC.2007.4456110

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Main Authors: Tanimoto, S., Pickard, D.S., Kenney, C., Hasi, J., Pease, R.F.W.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69805
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-698052015-01-29T23:58:21Z Demonstration of secondary electron detection using monolithic multi-channel electron detector Tanimoto, S. Pickard, D.S. Kenney, C. Hasi, J. Pease, R.F.W. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IMNC.2007.4456110 Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC 72-73 2014-06-19T03:04:50Z 2014-06-19T03:04:50Z 2007 Conference Paper Tanimoto, S.,Pickard, D.S.,Kenney, C.,Hasi, J.,Pease, R.F.W. (2007). Demonstration of secondary electron detection using monolithic multi-channel electron detector. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC : 72-73. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IMNC.2007.4456110" target="_blank">https://doi.org/10.1109/IMNC.2007.4456110</a> 4990247248 http://scholarbank.nus.edu.sg/handle/10635/69805 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description 10.1109/IMNC.2007.4456110
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Tanimoto, S.
Pickard, D.S.
Kenney, C.
Hasi, J.
Pease, R.F.W.
format Conference or Workshop Item
author Tanimoto, S.
Pickard, D.S.
Kenney, C.
Hasi, J.
Pease, R.F.W.
spellingShingle Tanimoto, S.
Pickard, D.S.
Kenney, C.
Hasi, J.
Pease, R.F.W.
Demonstration of secondary electron detection using monolithic multi-channel electron detector
author_sort Tanimoto, S.
title Demonstration of secondary electron detection using monolithic multi-channel electron detector
title_short Demonstration of secondary electron detection using monolithic multi-channel electron detector
title_full Demonstration of secondary electron detection using monolithic multi-channel electron detector
title_fullStr Demonstration of secondary electron detection using monolithic multi-channel electron detector
title_full_unstemmed Demonstration of secondary electron detection using monolithic multi-channel electron detector
title_sort demonstration of secondary electron detection using monolithic multi-channel electron detector
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/69805
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