Development of in-situ real-time CD monitoring and control system through PEB process

Development of in-situ real-time CD monitoring and control system through PEB process

10.1109/CCDC.2012.6243076

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Bibliographic Details
Main Authors: Yang, G., Tay, A., Ho, W.K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Critical Dimension
Ellipsometer
Post-Exposure Bake
Real-Time Control
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69922
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Institution: National University of Singapore
Description
Summary:10.1109/CCDC.2012.6243076

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