Development of in-situ real-time CD monitoring and control system through PEB process

10.1109/CCDC.2012.6243076

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Bibliographic Details
Main Authors:	Yang, G., Tay, A., Ho, W.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Critical Dimension Ellipsometer Post-Exposure Bake Real-Time Control
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/69922
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-69922
record_format	dspace
spelling	sg-nus-scholar.10635-699222015-01-13T21:49:47Z Development of in-situ real-time CD monitoring and control system through PEB process Yang, G. Tay, A. Ho, W.K. ELECTRICAL & COMPUTER ENGINEERING Critical Dimension Ellipsometer Post-Exposure Bake Real-Time Control 10.1109/CCDC.2012.6243076 Proceedings of the 2012 24th Chinese Control and Decision Conference, CCDC 2012 3080-3085 2014-06-19T03:06:11Z 2014-06-19T03:06:11Z 2012 Conference Paper Yang, G.,Tay, A.,Ho, W.K. (2012). Development of in-situ real-time CD monitoring and control system through PEB process. Proceedings of the 2012 24th Chinese Control and Decision Conference, CCDC 2012 : 3080-3085. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/CCDC.2012.6243076" target="_blank">https://doi.org/10.1109/CCDC.2012.6243076</a> 9781457720727 http://scholarbank.nus.edu.sg/handle/10635/69922 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Critical Dimension Ellipsometer Post-Exposure Bake Real-Time Control
spellingShingle	Critical Dimension Ellipsometer Post-Exposure Bake Real-Time Control Yang, G. Tay, A. Ho, W.K. Development of in-situ real-time CD monitoring and control system through PEB process
description	10.1109/CCDC.2012.6243076
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Yang, G. Tay, A. Ho, W.K.
format	Conference or Workshop Item
author	Yang, G. Tay, A. Ho, W.K.
author_sort	Yang, G.
title	Development of in-situ real-time CD monitoring and control system through PEB process
title_short	Development of in-situ real-time CD monitoring and control system through PEB process
title_full	Development of in-situ real-time CD monitoring and control system through PEB process
title_fullStr	Development of in-situ real-time CD monitoring and control system through PEB process
title_full_unstemmed	Development of in-situ real-time CD monitoring and control system through PEB process
title_sort	development of in-situ real-time cd monitoring and control system through peb process
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/69922
_version_	1681087102500995072

Development of in-situ real-time CD monitoring and control system through PEB process

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