Doped microcrystalline silicon layers for solar cells by 13.56 MHz plasma-enhanced chemical vapour deposition

Doped microcrystalline silicon layers for solar cells by 13.56 MHz plasma-enhanced chemical vapour deposition

10.1016/j.egypro.2012.02.028

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Bibliographic Details
Main Authors: Long, J., Yin, Y., Sian, S.Y.R., Ren, Z., Wang, J., Vayalakkara, P., Venkataraj, S., Aberle, A.G.
Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
Format: Conference or Workshop Item
Published: 2014
Subjects:
Crystallinity
Doped microcrystalline silicon
Silicon thin-film solar cells
Thin films
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70008
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Institution: National University of Singapore
Description
Summary:10.1016/j.egypro.2012.02.028

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