Doped microcrystalline silicon layers for solar cells by 13.56 MHz plasma-enhanced chemical vapour deposition

• Main Authors: Long, J., Yin, Y., Sian, S.Y.R., Ren, Z., Wang, J., Vayalakkara, P., Venkataraj, S., Aberle, A.G.
• Other Authors: SOLAR ENERGY RESEARCH INST OF S'PORE
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Crystallinity; Doped microcrystalline silicon; Silicon thin-film solar cells; Thin films
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/70008
• Institution: National University of Singapore

10.1016/j.egypro.2012.02.028