Effect of electric field on chemical bonds of carbon-doped silicon oxide as evidenced by in situ Fourier transform infrared spectroscopy
10.1116/1.1865114
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2014
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sg-nus-scholar.10635-700732023-10-30T08:41:37Z Effect of electric field on chemical bonds of carbon-doped silicon oxide as evidenced by in situ Fourier transform infrared spectroscopy Yiang, K.Y. Yoo, W.J. Krishnamoorthy, A. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.1865114 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 2 433-436 JVTBD 2014-06-19T03:07:55Z 2014-06-19T03:07:55Z 2005 Conference Paper Yiang, K.Y., Yoo, W.J., Krishnamoorthy, A. (2005). Effect of electric field on chemical bonds of carbon-doped silicon oxide as evidenced by in situ Fourier transform infrared spectroscopy. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 (2) : 433-436. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1865114 10711023 http://scholarbank.nus.edu.sg/handle/10635/70073 000228788600015 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1116/1.1865114 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Yiang, K.Y. Yoo, W.J. Krishnamoorthy, A. |
| format |
Conference or Workshop Item |
| author |
Yiang, K.Y. Yoo, W.J. Krishnamoorthy, A. |
| spellingShingle |
Yiang, K.Y. Yoo, W.J. Krishnamoorthy, A. Effect of electric field on chemical bonds of carbon-doped silicon oxide as evidenced by in situ Fourier transform infrared spectroscopy |
| author_sort |
Yiang, K.Y. |
| title |
Effect of electric field on chemical bonds of carbon-doped silicon oxide as evidenced by in situ Fourier transform infrared spectroscopy |
| title_short |
Effect of electric field on chemical bonds of carbon-doped silicon oxide as evidenced by in situ Fourier transform infrared spectroscopy |
| title_full |
Effect of electric field on chemical bonds of carbon-doped silicon oxide as evidenced by in situ Fourier transform infrared spectroscopy |
| title_fullStr |
Effect of electric field on chemical bonds of carbon-doped silicon oxide as evidenced by in situ Fourier transform infrared spectroscopy |
| title_full_unstemmed |
Effect of electric field on chemical bonds of carbon-doped silicon oxide as evidenced by in situ Fourier transform infrared spectroscopy |
| title_sort |
effect of electric field on chemical bonds of carbon-doped silicon oxide as evidenced by in situ fourier transform infrared spectroscopy |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/70073 |
| _version_ |
1781783135558565888 |