Elemental identification using transmitted and backscattered electrons in an SEM

10.1016/j.phpro.2008.07.091

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Bibliographic Details
Main Authors:	Luo, T., Khursheed, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Backscattered electron spectrum Electron energy loss spectroscopy Spectrometer aberration correction
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70151
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70151
record_format	dspace
spelling	sg-nus-scholar.10635-701512023-10-29T21:25:50Z Elemental identification using transmitted and backscattered electrons in an SEM Luo, T. Khursheed, A. ELECTRICAL & COMPUTER ENGINEERING Backscattered electron spectrum Electron energy loss spectroscopy Spectrometer aberration correction 10.1016/j.phpro.2008.07.091 Physics Procedia 1 1 155-160 2014-06-19T03:08:50Z 2014-06-19T03:08:50Z 2008-08 Conference Paper Luo, T., Khursheed, A. (2008-08). Elemental identification using transmitted and backscattered electrons in an SEM. Physics Procedia 1 (1) : 155-160. ScholarBank@NUS Repository. https://doi.org/10.1016/j.phpro.2008.07.091 18753884 http://scholarbank.nus.edu.sg/handle/10635/70151 000275907500019 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Backscattered electron spectrum Electron energy loss spectroscopy Spectrometer aberration correction
spellingShingle	Backscattered electron spectrum Electron energy loss spectroscopy Spectrometer aberration correction Luo, T. Khursheed, A. Elemental identification using transmitted and backscattered electrons in an SEM
description	10.1016/j.phpro.2008.07.091
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Luo, T. Khursheed, A.
format	Conference or Workshop Item
author	Luo, T. Khursheed, A.
author_sort	Luo, T.
title	Elemental identification using transmitted and backscattered electrons in an SEM
title_short	Elemental identification using transmitted and backscattered electrons in an SEM
title_full	Elemental identification using transmitted and backscattered electrons in an SEM
title_fullStr	Elemental identification using transmitted and backscattered electrons in an SEM
title_full_unstemmed	Elemental identification using transmitted and backscattered electrons in an SEM
title_sort	elemental identification using transmitted and backscattered electrons in an sem
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70151
_version_	1781783142672105472

Elemental identification using transmitted and backscattered electrons in an SEM

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