Experimental evaluation of multiplexed MPC for semiconductor manufacturing
Proceedings of 2009 7th Asian Control Conference, ASCC 2009
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2014
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sg-nus-scholar.10635-702502015-02-23T21:26:03Z Experimental evaluation of multiplexed MPC for semiconductor manufacturing Ling, K.V. Ho, W.K. Wu, B. Aribowo, A.G. Feng, Y. Yan, H. ELECTRICAL & COMPUTER ENGINEERING Proceedings of 2009 7th Asian Control Conference, ASCC 2009 1719-1722 2014-06-19T03:09:58Z 2014-06-19T03:09:58Z 2009 Conference Paper Ling, K.V.,Ho, W.K.,Wu, B.,Aribowo, A.G.,Feng, Y.,Yan, H. (2009). Experimental evaluation of multiplexed MPC for semiconductor manufacturing. Proceedings of 2009 7th Asian Control Conference, ASCC 2009 : 1719-1722. ScholarBank@NUS Repository. 9788995605691 http://scholarbank.nus.edu.sg/handle/10635/70250 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Proceedings of 2009 7th Asian Control Conference, ASCC 2009 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Ling, K.V. Ho, W.K. Wu, B. Aribowo, A.G. Feng, Y. Yan, H. |
| format |
Conference or Workshop Item |
| author |
Ling, K.V. Ho, W.K. Wu, B. Aribowo, A.G. Feng, Y. Yan, H. |
| spellingShingle |
Ling, K.V. Ho, W.K. Wu, B. Aribowo, A.G. Feng, Y. Yan, H. Experimental evaluation of multiplexed MPC for semiconductor manufacturing |
| author_sort |
Ling, K.V. |
| title |
Experimental evaluation of multiplexed MPC for semiconductor manufacturing |
| title_short |
Experimental evaluation of multiplexed MPC for semiconductor manufacturing |
| title_full |
Experimental evaluation of multiplexed MPC for semiconductor manufacturing |
| title_fullStr |
Experimental evaluation of multiplexed MPC for semiconductor manufacturing |
| title_full_unstemmed |
Experimental evaluation of multiplexed MPC for semiconductor manufacturing |
| title_sort |
experimental evaluation of multiplexed mpc for semiconductor manufacturing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/70250 |
| _version_ |
1681087164447719424 |