Experimental evaluation of multiplexed MPC for semiconductor manufacturing

Proceedings of 2009 7th Asian Control Conference, ASCC 2009

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Bibliographic Details
Main Authors: Ling, K.V., Ho, W.K., Wu, B., Aribowo, A.G., Feng, Y., Yan, H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70250
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-702502015-02-23T21:26:03Z Experimental evaluation of multiplexed MPC for semiconductor manufacturing Ling, K.V. Ho, W.K. Wu, B. Aribowo, A.G. Feng, Y. Yan, H. ELECTRICAL & COMPUTER ENGINEERING Proceedings of 2009 7th Asian Control Conference, ASCC 2009 1719-1722 2014-06-19T03:09:58Z 2014-06-19T03:09:58Z 2009 Conference Paper Ling, K.V.,Ho, W.K.,Wu, B.,Aribowo, A.G.,Feng, Y.,Yan, H. (2009). Experimental evaluation of multiplexed MPC for semiconductor manufacturing. Proceedings of 2009 7th Asian Control Conference, ASCC 2009 : 1719-1722. ScholarBank@NUS Repository. 9788995605691 http://scholarbank.nus.edu.sg/handle/10635/70250 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Proceedings of 2009 7th Asian Control Conference, ASCC 2009
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Ling, K.V.
Ho, W.K.
Wu, B.
Aribowo, A.G.
Feng, Y.
Yan, H.
format Conference or Workshop Item
author Ling, K.V.
Ho, W.K.
Wu, B.
Aribowo, A.G.
Feng, Y.
Yan, H.
spellingShingle Ling, K.V.
Ho, W.K.
Wu, B.
Aribowo, A.G.
Feng, Y.
Yan, H.
Experimental evaluation of multiplexed MPC for semiconductor manufacturing
author_sort Ling, K.V.
title Experimental evaluation of multiplexed MPC for semiconductor manufacturing
title_short Experimental evaluation of multiplexed MPC for semiconductor manufacturing
title_full Experimental evaluation of multiplexed MPC for semiconductor manufacturing
title_fullStr Experimental evaluation of multiplexed MPC for semiconductor manufacturing
title_full_unstemmed Experimental evaluation of multiplexed MPC for semiconductor manufacturing
title_sort experimental evaluation of multiplexed mpc for semiconductor manufacturing
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/70250
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