Fault detection and estimation of wafer warpage profile during thermal processing in microlithography

AIChE Annual Meeting, Conference Proceedings

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Bibliographic Details
Main Authors:	Tay, A., Ho, W.K., Hu, N., Zhou, Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Fault Detection Microlithography Photoresist Processing Semiconductor Manufacturing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70314
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70314
record_format	dspace
spelling	sg-nus-scholar.10635-703142015-02-23T20:42:03Z Fault detection and estimation of wafer warpage profile during thermal processing in microlithography Tay, A. Ho, W.K. Hu, N. Zhou, Y. ELECTRICAL & COMPUTER ENGINEERING Fault Detection Microlithography Photoresist Processing Semiconductor Manufacturing AIChE Annual Meeting, Conference Proceedings 7493-7508 2014-06-19T03:10:42Z 2014-06-19T03:10:42Z 2004 Conference Paper Tay, A.,Ho, W.K.,Hu, N.,Zhou, Y. (2004). Fault detection and estimation of wafer warpage profile during thermal processing in microlithography. AIChE Annual Meeting, Conference Proceedings : 7493-7508. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/70314 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Fault Detection Microlithography Photoresist Processing Semiconductor Manufacturing
spellingShingle	Fault Detection Microlithography Photoresist Processing Semiconductor Manufacturing Tay, A. Ho, W.K. Hu, N. Zhou, Y. Fault detection and estimation of wafer warpage profile during thermal processing in microlithography
description	AIChE Annual Meeting, Conference Proceedings
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tay, A. Ho, W.K. Hu, N. Zhou, Y.
format	Conference or Workshop Item
author	Tay, A. Ho, W.K. Hu, N. Zhou, Y.
author_sort	Tay, A.
title	Fault detection and estimation of wafer warpage profile during thermal processing in microlithography
title_short	Fault detection and estimation of wafer warpage profile during thermal processing in microlithography
title_full	Fault detection and estimation of wafer warpage profile during thermal processing in microlithography
title_fullStr	Fault detection and estimation of wafer warpage profile during thermal processing in microlithography
title_full_unstemmed	Fault detection and estimation of wafer warpage profile during thermal processing in microlithography
title_sort	fault detection and estimation of wafer warpage profile during thermal processing in microlithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70314
_version_	1681087176336474112

Fault detection and estimation of wafer warpage profile during thermal processing in microlithography

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