Femtosecond laser irradiation for functional micro-/nanostructure fabrication

• Main Authors: Hong, M., Chen, Z., Tang, M., Shi, L., Chong, T.C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Fs laser; Microfabrication; Nano-engineering
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/70331
• Institution: National University of Singapore

10.1109/CLEOPR.2009.5292198