In-situ monitoring of photoresist thickness contour

10.1109/INDIN.2006.275769

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Bibliographic Details
Main Authors:	Ho, W.K., Wu, X., Tay, A., Chen, X.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70611
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70611
record_format	dspace
spelling	sg-nus-scholar.10635-706112015-03-12T15:53:44Z In-situ monitoring of photoresist thickness contour Ho, W.K. Wu, X. Tay, A. Chen, X. ELECTRICAL & COMPUTER ENGINEERING 10.1109/INDIN.2006.275769 2006 IEEE International Conference on Industrial Informatics, INDIN'06 1091-1095 2014-06-19T03:14:09Z 2014-06-19T03:14:09Z 2007 Conference Paper Ho, W.K.,Wu, X.,Tay, A.,Chen, X. (2007). In-situ monitoring of photoresist thickness contour. 2006 IEEE International Conference on Industrial Informatics, INDIN'06 : 1091-1095. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/INDIN.2006.275769" target="_blank">https://doi.org/10.1109/INDIN.2006.275769</a> 0780397010 http://scholarbank.nus.edu.sg/handle/10635/70611 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/INDIN.2006.275769
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Ho, W.K. Wu, X. Tay, A. Chen, X.
format	Conference or Workshop Item
author	Ho, W.K. Wu, X. Tay, A. Chen, X.
spellingShingle	Ho, W.K. Wu, X. Tay, A. Chen, X. In-situ monitoring of photoresist thickness contour
author_sort	Ho, W.K.
title	In-situ monitoring of photoresist thickness contour
title_short	In-situ monitoring of photoresist thickness contour
title_full	In-situ monitoring of photoresist thickness contour
title_fullStr	In-situ monitoring of photoresist thickness contour
title_full_unstemmed	In-situ monitoring of photoresist thickness contour
title_sort	in-situ monitoring of photoresist thickness contour
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70611
_version_	1681087231790415872

In-situ monitoring of photoresist thickness contour

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