Laser microprocessing and the applications in microelectronics industry

10.1117/12.413755

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Bibliographic Details
Main Authors:	Lu, Y.F., Ren, Z.M.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Laser bumping Laser cleaning Laser microprocessing Laser nanoprocessing Laser texturing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70762
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70762
record_format	dspace
spelling	sg-nus-scholar.10635-707622023-10-30T07:42:31Z Laser microprocessing and the applications in microelectronics industry Lu, Y.F. Ren, Z.M. ELECTRICAL & COMPUTER ENGINEERING Laser bumping Laser cleaning Laser microprocessing Laser nanoprocessing Laser texturing 10.1117/12.413755 Proceedings of SPIE - The International Society for Optical Engineering 4157 191-199 PSISD 2014-06-19T03:15:55Z 2014-06-19T03:15:55Z 2001 Conference Paper Lu, Y.F., Ren, Z.M. (2001). Laser microprocessing and the applications in microelectronics industry. Proceedings of SPIE - The International Society for Optical Engineering 4157 : 191-199. ScholarBank@NUS Repository. https://doi.org/10.1117/12.413755 0277786X http://scholarbank.nus.edu.sg/handle/10635/70762 000168412200024 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Laser bumping Laser cleaning Laser microprocessing Laser nanoprocessing Laser texturing
spellingShingle	Laser bumping Laser cleaning Laser microprocessing Laser nanoprocessing Laser texturing Lu, Y.F. Ren, Z.M. Laser microprocessing and the applications in microelectronics industry
description	10.1117/12.413755
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lu, Y.F. Ren, Z.M.
format	Conference or Workshop Item
author	Lu, Y.F. Ren, Z.M.
author_sort	Lu, Y.F.
title	Laser microprocessing and the applications in microelectronics industry
title_short	Laser microprocessing and the applications in microelectronics industry
title_full	Laser microprocessing and the applications in microelectronics industry
title_fullStr	Laser microprocessing and the applications in microelectronics industry
title_full_unstemmed	Laser microprocessing and the applications in microelectronics industry
title_sort	laser microprocessing and the applications in microelectronics industry
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70762
_version_	1781783179449860096

Laser microprocessing and the applications in microelectronics industry

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