Laser microprocessing in microelectronics, data storage and photonics

• Main Authors: Lu, Y.F., Song, W.D., Ren, Z.M., An, C.W., Liu, D.M., Huang, S.M., Wang, W.J., Hong, M.H., Chong, T.C., Cho, B.J., Zeng, J.N., Tan, C.F.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Laser deflash; Laser mold cleaning; Laser nanopatterning; Laser packaging; Laser-induced periodic structures; Real-time monitoring; Si nanoparticles; Ultrashallow pn junction
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/70763
• Institution: National University of Singapore

10.1117/12.482088