Laser microprocessing in microelectronics, data storage and photonics

10.1117/12.482088

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Bibliographic Details
Main Authors:	Lu, Y.F., Song, W.D., Ren, Z.M., An, C.W., Liu, D.M., Huang, S.M., Wang, W.J., Hong, M.H., Chong, T.C., Cho, B.J., Zeng, J.N., Tan, C.F.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Laser deflash Laser mold cleaning Laser nanopatterning Laser packaging Laser-induced periodic structures Real-time monitoring Si nanoparticles Ultrashallow pn junction
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70763
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70763
record_format	dspace
spelling	sg-nus-scholar.10635-707632024-11-15T04:39:18Z Laser microprocessing in microelectronics, data storage and photonics Lu, Y.F. Song, W.D. Ren, Z.M. An, C.W. Liu, D.M. Huang, S.M. Wang, W.J. Hong, M.H. Chong, T.C. Cho, B.J. Zeng, J.N. Tan, C.F. ELECTRICAL & COMPUTER ENGINEERING DATA STORAGE INSTITUTE Laser deflash Laser mold cleaning Laser nanopatterning Laser packaging Laser-induced periodic structures Real-time monitoring Si nanoparticles Ultrashallow pn junction 10.1117/12.482088 Proceedings of SPIE - The International Society for Optical Engineering 4760 I 211-222 PSISD 2014-06-19T03:15:56Z 2014-06-19T03:15:56Z 2002 Conference Paper Lu, Y.F., Song, W.D., Ren, Z.M., An, C.W., Liu, D.M., Huang, S.M., Wang, W.J., Hong, M.H., Chong, T.C., Cho, B.J., Zeng, J.N., Tan, C.F. (2002). Laser microprocessing in microelectronics, data storage and photonics. Proceedings of SPIE - The International Society for Optical Engineering 4760 (I) : 211-222. ScholarBank@NUS Repository. https://doi.org/10.1117/12.482088 0277786X http://scholarbank.nus.edu.sg/handle/10635/70763 000179254400023 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Laser deflash Laser mold cleaning Laser nanopatterning Laser packaging Laser-induced periodic structures Real-time monitoring Si nanoparticles Ultrashallow pn junction
spellingShingle	Laser deflash Laser mold cleaning Laser nanopatterning Laser packaging Laser-induced periodic structures Real-time monitoring Si nanoparticles Ultrashallow pn junction Lu, Y.F. Song, W.D. Ren, Z.M. An, C.W. Liu, D.M. Huang, S.M. Wang, W.J. Hong, M.H. Chong, T.C. Cho, B.J. Zeng, J.N. Tan, C.F. Laser microprocessing in microelectronics, data storage and photonics
description	10.1117/12.482088
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lu, Y.F. Song, W.D. Ren, Z.M. An, C.W. Liu, D.M. Huang, S.M. Wang, W.J. Hong, M.H. Chong, T.C. Cho, B.J. Zeng, J.N. Tan, C.F.
format	Conference or Workshop Item
author	Lu, Y.F. Song, W.D. Ren, Z.M. An, C.W. Liu, D.M. Huang, S.M. Wang, W.J. Hong, M.H. Chong, T.C. Cho, B.J. Zeng, J.N. Tan, C.F.
author_sort	Lu, Y.F.
title	Laser microprocessing in microelectronics, data storage and photonics
title_short	Laser microprocessing in microelectronics, data storage and photonics
title_full	Laser microprocessing in microelectronics, data storage and photonics
title_fullStr	Laser microprocessing in microelectronics, data storage and photonics
title_full_unstemmed	Laser microprocessing in microelectronics, data storage and photonics
title_sort	laser microprocessing in microelectronics, data storage and photonics
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70763
_version_	1821226534188351488

Laser microprocessing in microelectronics, data storage and photonics

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