Measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturing

10.1109/IECON.2007.4459962

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Bibliographic Details
Main Authors:	Ho, W.K., Yan, H., Romagnoli, J.A., Ling, K.V.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70897
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-708972024-11-10T17:36:10Z Measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturing Ho, W.K. Yan, H. Romagnoli, J.A. Ling, K.V. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IECON.2007.4459962 IECON Proceedings (Industrial Electronics Conference) 2678-2682 IEPRE 2014-06-19T03:17:32Z 2014-06-19T03:17:32Z 2007 Conference Paper Ho, W.K., Yan, H., Romagnoli, J.A., Ling, K.V. (2007). Measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturing. IECON Proceedings (Industrial Electronics Conference) : 2678-2682. ScholarBank@NUS Repository. https://doi.org/10.1109/IECON.2007.4459962 1424407834 http://scholarbank.nus.edu.sg/handle/10635/70897 000253451402109 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1109/IECON.2007.4459962
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Ho, W.K. Yan, H. Romagnoli, J.A. Ling, K.V.
format	Conference or Workshop Item
author	Ho, W.K. Yan, H. Romagnoli, J.A. Ling, K.V.
spellingShingle	Ho, W.K. Yan, H. Romagnoli, J.A. Ling, K.V. Measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturing
author_sort	Ho, W.K.
title	Measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturing
title_short	Measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturing
title_full	Measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturing
title_fullStr	Measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturing
title_full_unstemmed	Measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturing
title_sort	measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70897
_version_	1821182957057998848

Measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturing

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