Microprocessing of glass by hybrid laser processing

10.1117/12.482090

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Bibliographic Details
Main Authors:	Sugioka, K., Obata, K., Midorikawa, K., Hong, M.H., Wu, D.J., Wong, L.L., Lu, Y.F., Chong, T.C.
Other Authors:	DATA STORAGE INSTITUTE
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Ablation F 2 laser Fused silica Glass Hybrid laser processing Laser-induced plasma Micromachining Multiwavelength excitation Precision microfabrication VUV laser
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70934
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Institution:	National University of Singapore

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Summary:	10.1117/12.482090

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