Microprocessing of glass by hybrid laser processing
10.1117/12.482090
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2014
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sg-nus-scholar.10635-709342023-10-29T22:00:38Z Microprocessing of glass by hybrid laser processing Sugioka, K. Obata, K. Midorikawa, K. Hong, M.H. Wu, D.J. Wong, L.L. Lu, Y.F. Chong, T.C. DATA STORAGE INSTITUTE ELECTRICAL & COMPUTER ENGINEERING Ablation F 2 laser Fused silica Glass Hybrid laser processing Laser-induced plasma Micromachining Multiwavelength excitation Precision microfabrication VUV laser 10.1117/12.482090 Proceedings of SPIE - The International Society for Optical Engineering 4760 I 230-238 PSISD 2014-06-19T03:17:57Z 2014-06-19T03:17:57Z 2002 Conference Paper Sugioka, K., Obata, K., Midorikawa, K., Hong, M.H., Wu, D.J., Wong, L.L., Lu, Y.F., Chong, T.C. (2002). Microprocessing of glass by hybrid laser processing. Proceedings of SPIE - The International Society for Optical Engineering 4760 (I) : 230-238. ScholarBank@NUS Repository. https://doi.org/10.1117/12.482090 0277786X http://scholarbank.nus.edu.sg/handle/10635/70934 000179254400025 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Ablation F 2 laser Fused silica Glass Hybrid laser processing Laser-induced plasma Micromachining Multiwavelength excitation Precision microfabrication VUV laser |
| spellingShingle |
Ablation F 2 laser Fused silica Glass Hybrid laser processing Laser-induced plasma Micromachining Multiwavelength excitation Precision microfabrication VUV laser Sugioka, K. Obata, K. Midorikawa, K. Hong, M.H. Wu, D.J. Wong, L.L. Lu, Y.F. Chong, T.C. Microprocessing of glass by hybrid laser processing |
| description |
10.1117/12.482090 |
| author2 |
DATA STORAGE INSTITUTE |
| author_facet |
DATA STORAGE INSTITUTE Sugioka, K. Obata, K. Midorikawa, K. Hong, M.H. Wu, D.J. Wong, L.L. Lu, Y.F. Chong, T.C. |
| format |
Conference or Workshop Item |
| author |
Sugioka, K. Obata, K. Midorikawa, K. Hong, M.H. Wu, D.J. Wong, L.L. Lu, Y.F. Chong, T.C. |
| author_sort |
Sugioka, K. |
| title |
Microprocessing of glass by hybrid laser processing |
| title_short |
Microprocessing of glass by hybrid laser processing |
| title_full |
Microprocessing of glass by hybrid laser processing |
| title_fullStr |
Microprocessing of glass by hybrid laser processing |
| title_full_unstemmed |
Microprocessing of glass by hybrid laser processing |
| title_sort |
microprocessing of glass by hybrid laser processing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/70934 |
| _version_ |
1781783188376387584 |