Nonlinear behavior modeling of SOI micromechanical free-free beam resonators

10.1117/12.759624

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Bibliographic Details
Main Authors:	Shao, L., Palaniapan, M.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Free-free beam Micromechanical resonator Nonlinear vibration
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71151
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-71151
record_format	dspace
spelling	sg-nus-scholar.10635-711512024-11-09T07:24:32Z Nonlinear behavior modeling of SOI micromechanical free-free beam resonators Shao, L. Palaniapan, M. ELECTRICAL & COMPUTER ENGINEERING Free-free beam Micromechanical resonator Nonlinear vibration 10.1117/12.759624 Proceedings of SPIE - The International Society for Optical Engineering 6798 - PSISD 2014-06-19T03:20:25Z 2014-06-19T03:20:25Z 2008 Conference Paper Shao, L., Palaniapan, M. (2008). Nonlinear behavior modeling of SOI micromechanical free-free beam resonators. Proceedings of SPIE - The International Society for Optical Engineering 6798 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.759624 9780819469694 0277786X http://scholarbank.nus.edu.sg/handle/10635/71151 000254226300017 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Free-free beam Micromechanical resonator Nonlinear vibration
spellingShingle	Free-free beam Micromechanical resonator Nonlinear vibration Shao, L. Palaniapan, M. Nonlinear behavior modeling of SOI micromechanical free-free beam resonators
description	10.1117/12.759624
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Shao, L. Palaniapan, M.
format	Conference or Workshop Item
author	Shao, L. Palaniapan, M.
author_sort	Shao, L.
title	Nonlinear behavior modeling of SOI micromechanical free-free beam resonators
title_short	Nonlinear behavior modeling of SOI micromechanical free-free beam resonators
title_full	Nonlinear behavior modeling of SOI micromechanical free-free beam resonators
title_fullStr	Nonlinear behavior modeling of SOI micromechanical free-free beam resonators
title_full_unstemmed	Nonlinear behavior modeling of SOI micromechanical free-free beam resonators
title_sort	nonlinear behavior modeling of soi micromechanical free-free beam resonators
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71151
_version_	1821220224093913088

Nonlinear behavior modeling of SOI micromechanical free-free beam resonators

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