Nonlinear behavior modeling of SOI micromechanical free-free beam resonators

Nonlinear behavior modeling of SOI micromechanical free-free beam resonators

10.1117/12.759624

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Bibliographic Details
Main Authors: Shao, L., Palaniapan, M.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Free-free beam
Micromechanical resonator
Nonlinear vibration
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71151
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/71151

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