Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors

Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors

10.1016/j.sna.2010.01.006

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Bibliographic Details
Main Authors: Mai, T.T., Hsiao, F.-L., Lee, C., Xiang, W., Chen, C.-C., Choi, W.K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
MEMS
Microcantilever
Nano-ring
Nanomechanical sensor
NEMS
Photonic crystal resonator
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71313
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Institution: National University of Singapore
Description
Summary:10.1016/j.sna.2010.01.006

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