Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors
10.1016/j.sna.2010.01.006
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2014
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sg-nus-scholar.10635-713132023-10-30T07:53:06Z Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors Mai, T.T. Hsiao, F.-L. Lee, C. Xiang, W. Chen, C.-C. Choi, W.K. ELECTRICAL & COMPUTER ENGINEERING MEMS Microcantilever Nano-ring Nanomechanical sensor NEMS Photonic crystal resonator 10.1016/j.sna.2010.01.006 Sensors and Actuators, A: Physical 165 1 16-25 SAAPE 2014-06-19T03:22:19Z 2014-06-19T03:22:19Z 2011-01 Conference Paper Mai, T.T., Hsiao, F.-L., Lee, C., Xiang, W., Chen, C.-C., Choi, W.K. (2011-01). Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors. Sensors and Actuators, A: Physical 165 (1) : 16-25. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2010.01.006 09244247 http://scholarbank.nus.edu.sg/handle/10635/71313 000288293600004 Scopus |
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MEMS Microcantilever Nano-ring Nanomechanical sensor NEMS Photonic crystal resonator |
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MEMS Microcantilever Nano-ring Nanomechanical sensor NEMS Photonic crystal resonator Mai, T.T. Hsiao, F.-L. Lee, C. Xiang, W. Chen, C.-C. Choi, W.K. Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors |
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10.1016/j.sna.2010.01.006 |
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ELECTRICAL & COMPUTER ENGINEERING |
author_facet |
ELECTRICAL & COMPUTER ENGINEERING Mai, T.T. Hsiao, F.-L. Lee, C. Xiang, W. Chen, C.-C. Choi, W.K. |
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Conference or Workshop Item |
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Mai, T.T. Hsiao, F.-L. Lee, C. Xiang, W. Chen, C.-C. Choi, W.K. |
author_sort |
Mai, T.T. |
title |
Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors |
title_short |
Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors |
title_full |
Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors |
title_fullStr |
Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors |
title_full_unstemmed |
Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors |
title_sort |
optimization and comparison of photonic crystal resonators for silicon microcantilever sensors |
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2014 |
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http://scholarbank.nus.edu.sg/handle/10635/71313 |
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1781783201566425088 |