Parallel nanostructuring of GeSbTe film with particle mask

Applied Physics A: Materials Science and Processing

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Bibliographic Details
Main Authors:	Wang, Z.B., Hong, M.H., Lukyanchuk, B.S., Huang, S.M., Wang, Q.F., Shi, L.P., Chong, T.C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71358
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Institution:	National University of Singapore

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Summary:	Applied Physics A: Materials Science and Processing

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