Parallel nanostructuring of GeSbTe film with particle mask

Applied Physics A: Materials Science and Processing

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Bibliographic Details
Main Authors: Wang, Z.B., Hong, M.H., Lukyanchuk, B.S., Huang, S.M., Wang, Q.F., Shi, L.P., Chong, T.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71358
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-713582015-01-25T05:39:02Z Parallel nanostructuring of GeSbTe film with particle mask Wang, Z.B. Hong, M.H. Lukyanchuk, B.S. Huang, S.M. Wang, Q.F. Shi, L.P. Chong, T.C. ELECTRICAL & COMPUTER ENGINEERING Applied Physics A: Materials Science and Processing 79 4-6 1603-1606 APAMF 2014-06-19T03:22:49Z 2014-06-19T03:22:49Z 2004-09 Conference Paper Wang, Z.B.,Hong, M.H.,Lukyanchuk, B.S.,Huang, S.M.,Wang, Q.F.,Shi, L.P.,Chong, T.C. (2004-09). Parallel nanostructuring of GeSbTe film with particle mask. Applied Physics A: Materials Science and Processing 79 (4-6) : 1603-1606. ScholarBank@NUS Repository. 09478396 http://scholarbank.nus.edu.sg/handle/10635/71358 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Applied Physics A: Materials Science and Processing
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Wang, Z.B.
Hong, M.H.
Lukyanchuk, B.S.
Huang, S.M.
Wang, Q.F.
Shi, L.P.
Chong, T.C.
format Conference or Workshop Item
author Wang, Z.B.
Hong, M.H.
Lukyanchuk, B.S.
Huang, S.M.
Wang, Q.F.
Shi, L.P.
Chong, T.C.
spellingShingle Wang, Z.B.
Hong, M.H.
Lukyanchuk, B.S.
Huang, S.M.
Wang, Q.F.
Shi, L.P.
Chong, T.C.
Parallel nanostructuring of GeSbTe film with particle mask
author_sort Wang, Z.B.
title Parallel nanostructuring of GeSbTe film with particle mask
title_short Parallel nanostructuring of GeSbTe film with particle mask
title_full Parallel nanostructuring of GeSbTe film with particle mask
title_fullStr Parallel nanostructuring of GeSbTe film with particle mask
title_full_unstemmed Parallel nanostructuring of GeSbTe film with particle mask
title_sort parallel nanostructuring of gesbte film with particle mask
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/71358
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