Strain-transfer structure beneath the transistor channel for increasing the strain effects of lattice-mismatched source and drain stressors

Materials Research Society Symposium Proceedings

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Main Authors: Yeo, Y.-C., Ang, K.-W., Lin, J., Lam, C.-S.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71874
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-718742024-11-08T16:45:23Z Strain-transfer structure beneath the transistor channel for increasing the strain effects of lattice-mismatched source and drain stressors Yeo, Y.-C. Ang, K.-W. Lin, J. Lam, C.-S. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium Proceedings 995 1-6 MRSPD 2014-06-19T03:28:49Z 2014-06-19T03:28:49Z 2007 Conference Paper Yeo, Y.-C.,Ang, K.-W.,Lin, J.,Lam, C.-S. (2007). Strain-transfer structure beneath the transistor channel for increasing the strain effects of lattice-mismatched source and drain stressors. Materials Research Society Symposium Proceedings 995 : 1-6. ScholarBank@NUS Repository. 9781605604275 02729172 http://scholarbank.nus.edu.sg/handle/10635/71874 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description Materials Research Society Symposium Proceedings
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Yeo, Y.-C.
Ang, K.-W.
Lin, J.
Lam, C.-S.
format Conference or Workshop Item
author Yeo, Y.-C.
Ang, K.-W.
Lin, J.
Lam, C.-S.
spellingShingle Yeo, Y.-C.
Ang, K.-W.
Lin, J.
Lam, C.-S.
Strain-transfer structure beneath the transistor channel for increasing the strain effects of lattice-mismatched source and drain stressors
author_sort Yeo, Y.-C.
title Strain-transfer structure beneath the transistor channel for increasing the strain effects of lattice-mismatched source and drain stressors
title_short Strain-transfer structure beneath the transistor channel for increasing the strain effects of lattice-mismatched source and drain stressors
title_full Strain-transfer structure beneath the transistor channel for increasing the strain effects of lattice-mismatched source and drain stressors
title_fullStr Strain-transfer structure beneath the transistor channel for increasing the strain effects of lattice-mismatched source and drain stressors
title_full_unstemmed Strain-transfer structure beneath the transistor channel for increasing the strain effects of lattice-mismatched source and drain stressors
title_sort strain-transfer structure beneath the transistor channel for increasing the strain effects of lattice-mismatched source and drain stressors
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/71874
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