Temperature control and in-situ fault detection of wafer warpage
IECON Proceedings (Industrial Electronics Conference)
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2014
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sg-nus-scholar.10635-719502024-11-14T02:32:31Z Temperature control and in-situ fault detection of wafer warpage Ho, W.K. Yap, C. Tay, A. Chen, W. Lim, K.W. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING IECON Proceedings (Industrial Electronics Conference) 3 2560-2565 IEPRE 2014-06-19T03:29:41Z 2014-06-19T03:29:41Z 2004 Conference Paper Ho, W.K.,Yap, C.,Tay, A.,Chen, W.,Lim, K.W. (2004). Temperature control and in-situ fault detection of wafer warpage. IECON Proceedings (Industrial Electronics Conference) 3 : 2560-2565. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/71950 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
IECON Proceedings (Industrial Electronics Conference) |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Ho, W.K. Yap, C. Tay, A. Chen, W. Lim, K.W. |
| format |
Conference or Workshop Item |
| author |
Ho, W.K. Yap, C. Tay, A. Chen, W. Lim, K.W. |
| spellingShingle |
Ho, W.K. Yap, C. Tay, A. Chen, W. Lim, K.W. Temperature control and in-situ fault detection of wafer warpage |
| author_sort |
Ho, W.K. |
| title |
Temperature control and in-situ fault detection of wafer warpage |
| title_short |
Temperature control and in-situ fault detection of wafer warpage |
| title_full |
Temperature control and in-situ fault detection of wafer warpage |
| title_fullStr |
Temperature control and in-situ fault detection of wafer warpage |
| title_full_unstemmed |
Temperature control and in-situ fault detection of wafer warpage |
| title_sort |
temperature control and in-situ fault detection of wafer warpage |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/71950 |
| _version_ |
1821215559670300672 |