Temperature control and in-situ fault detection of wafer warpage

• Main Authors: Ho, W.K., Yap, C., Tay, A., Chen, W., Lim, K.W.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/71950
• Institution: National University of Singapore

IECON Proceedings (Industrial Electronics Conference)