Toroidal spectrometer for signal detection in scanning ion/electron microscopes
10.1116/1.3250202
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2014
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sg-nus-scholar.10635-720412024-11-11T01:21:55Z Toroidal spectrometer for signal detection in scanning ion/electron microscopes Hoang, H.Q. Khursheed, A. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.3250202 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 27 6 3226-3231 JVTBD 2014-06-19T03:30:46Z 2014-06-19T03:30:46Z 2009 Conference Paper Hoang, H.Q., Khursheed, A. (2009). Toroidal spectrometer for signal detection in scanning ion/electron microscopes. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 27 (6) : 3226-3231. ScholarBank@NUS Repository. https://doi.org/10.1116/1.3250202 10711023 http://scholarbank.nus.edu.sg/handle/10635/72041 000272803400180 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1116/1.3250202 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Hoang, H.Q. Khursheed, A. |
| format |
Conference or Workshop Item |
| author |
Hoang, H.Q. Khursheed, A. |
| spellingShingle |
Hoang, H.Q. Khursheed, A. Toroidal spectrometer for signal detection in scanning ion/electron microscopes |
| author_sort |
Hoang, H.Q. |
| title |
Toroidal spectrometer for signal detection in scanning ion/electron microscopes |
| title_short |
Toroidal spectrometer for signal detection in scanning ion/electron microscopes |
| title_full |
Toroidal spectrometer for signal detection in scanning ion/electron microscopes |
| title_fullStr |
Toroidal spectrometer for signal detection in scanning ion/electron microscopes |
| title_full_unstemmed |
Toroidal spectrometer for signal detection in scanning ion/electron microscopes |
| title_sort |
toroidal spectrometer for signal detection in scanning ion/electron microscopes |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/72041 |
| _version_ |
1821191579439726592 |